Key Features:
•Sub-atomic Layer Sensitivity to Wafer Surface Chemistry Variation and  Contamination
•Non-contact, Non-destructive Inspection
•Rapid High Resolution Whole-wafer Mapping and Imaging
•Bare, Blanket, and Patterned Wafer Support
•Fully Automated and Fab Ready for 200mm/300mm Production Monitoring

Inspection Applications:
•Wet Cleans
•Process-induced Charging
•Surface Preparation
•Post CMP Cleans
•Metal Contaminants
•Post Maintenance Quals
•Edge Inspection
•Bumped and Diced Wafer Contamination

Includes Installation & Training

1 Year Technical Support and Warranty Coverage

• 
  Qcept's ChemetriQ® 3000 Series
• Inspection System
• 
  Production inspection for High-Volume Advanced Fabs to Rapidly Detect and Map Non-Visual Defect Contamination.
  
  
  
  •Go Beyond Optical
  
  •Raise Yield
  
  •Improve Efficiency